作者: Satoshi c , Nobuyoshi c , Shinya c , Tamenori Shirai
DOI:
关键词:
摘要: Abstract of EP0926464A surface property measuring device includes a detector having stylus, and driving mechanism for causing the to advance retreat along be measured. The further comprises main shaft (104) fixed frame (102) (100) in parallel with an advancing retreating direction (200), slide block (108), which is shaped like substantially &cir& elongated detector, sliding on (104), being inserted through two fore rear portion block. This results improvement straightness accuracy movement reduces cost while stabilizing measurement accuracy.