Method for supplying deposition material, method for producing substrate, control device, and deposition device
作者： Nobuyuki Shigeoka , Ryuta Yamaguchi , Tetsuya Goto
DOI:
关键词:
摘要: Provided is a method for supplying deposition material including heating step of and evaporating accommodated in accommodating section which the accommodated, supply into by feeding melting solid phase toward melted section, state detection detecting after step.
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