摘要: Selfsputtering and reflection are investigated with the Monte Carlo program TRIMSP. The results include particle energy coefficients, sputtering yields sputtered versus incident angle energy. Angular distributions of reflected particles also given. Reflection values compared to show their contributions selfsputtering. A comparison calculated efficiencies (sputtered energy) experimental data is carried out. systems mainly bombardement C, Ni, W self-ions at low energies. All global summarized in graphs, where scaling properties utilized including yield a generalized form.
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