Sulfuric Acid Recycling Type Cleaning System and a Sulfuric Acid Recycling Type Persulfuric Acid Supply Apparatus
作者： Hideki Kobayashi , Haruyoshi Yamakawa , Hiroshi Morita , Tatsuo Nagai , Norihito Ikemiya
DOI:
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摘要: If incorporated in a cleaning system using persulfuric acid, the invention serves for continuous while increasing acid concentration adequately to ensure enhanced performance. The provides feeding apparatus that feeds apparatus. uses an electrolysis reactor 10 regenerates solution by performing electrolytic reaction produce persulfate ions from sulfate contained solution, and circulation line 4, 5, 6 circulates between vessel 1 10. Configured as above, can comprises said configuration cleans objects 30 2 fluid.
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