Flash rusting liquid medicine applicable to MSAP process

作者: Huang Zhiqi , Wang Kuojun , Ding Jie , Xia Hai , Hao Yi

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摘要: The invention discloses a flash rusting liquid medicine applicable to an MSAP process. A banking agent and copper ions in the form complex be attached surface of copper, sothat base between circuits can spray towards horizontal spraying equipment; protection film is cracked easily enable etched dissolved, while on side wall circuit suffers from relatively low disturbance, so that protected corrosion; therefore, coating etching suppression layer before not needed; control rate half top rate; by virtue wetting agent, hydrophilicity improved, hat fully reacted with achieve acceleration effect; stabilizing hydrogen peroxide decomposed high resistance; process fine linewidth line spacing 45[mu]m or below; addition, reliability achievedin process, vacuum equipment needed, cost, simple easy management are achieved.

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