Substrate support device
作者： Jun Futakuchiya , Junichi Miyahara , Daisuke Hashimoto
DOI:
关键词:
摘要: A substrate support device formed of a metal and having high withstand voltage thermal resistance is provided. according to the present invention includes plate section metal; shaft connected heating element provided in section; an insulating film on first surface section, opposite by ceramic spraying. The may further include second which intersects approximately perpendicularly.
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