The Sputtering of Nickel–Chromium Alloys
作者： W. L. Patterson , G. A. Shirn
DOI: 10.1116/1.1492560
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摘要: Ni-Cr alloys having the compositions (in at. %) Ni-22 Cr, Ni-42 Cr, and Ni-80 Cr were sputtered in argon in a low-pressure supported discharge. Ion energy was varied from 200 to 1000 …
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