Wear mechanisms in a reliability methodology
作者： Danelle M. Tanner , Michael T. Dugger
DOI: 10.1117/12.476345
关键词:
摘要: … This paper will review some of the methods developed specifically … This paper will focus on the failure mechanism of wear and how our … Silicon nitride sliding on silicon nitride was also …
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sandia.gov 参考文章(22)
DANELLE M. TANNER, NORMAN F. SMITH, LLOYD W. IRWIN, WILLIAM P. EATON, KAREN SUE HELGESEN, J. JOSEPH CLEMENT, WILLIAM M. MILLER, SAMUEL L. MILLER, MICHAEL T. DUGGER, JEREMY A. WALRAVEN, KENNETH A. PETERSON, MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes Other Information: PBD: 1 Jan 2000. ,(2000) , 10.2172/750344
M. N. Gardos, Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications Springer, Dordrecht. pp. 341- 365 ,(1998) , 10.1007/978-94-011-5050-7_25
U. Srinivasan, J.D. Foster, U. Habib, R.T. Howe, R. Maboudian, D.C. Senft, M.T. Dugger, Lubrication of polysilicon micromechanisms with self-assembled monolayers 1998 solid state sensor and actuator workshop, Hilton Head, SC (United States), 1 Jun 1998. ,(1998) , 10.2172/671989
D.M. Tanner, J.A. Walraven, L.W. Irwin, M.T. Dugger, N.F. Smith, W.P. Eaton, W.M. Miller, S.L. Miller, The effect of humidity on the reliability of a surface micromachined microengine international reliability physics symposium. pp. 189- 197 ,(1999) , 10.1109/RELPHY.1999.761611
K.J. Gabriel, F. Behi, R. Mahadevan, M. Mehregany, In situ friction and wear measurements in integrated polysilicon mechanisms Sensors and Actuators A-physical. ,vol. 21, pp. 184- 188 ,(1990) , 10.1016/0924-4247(90)85035-3
K. Adachi, K. Kato, N. Chen, Wear map of ceramics Wear. pp. 291- 301 ,(1997) , 10.1016/S0043-1648(96)07363-2
M. Mosleh, N. Saka, N.P. Suh, A mechanism of high friction in dry sliding bearings Wear. ,vol. 252, pp. 1- 8 ,(2002) , 10.1016/S0043-1648(01)00583-X
M.F. Ashby, S.C. Lim, Wear-mechanism maps Scripta Metallurgica Et Materialia. ,vol. 24, pp. 805- 810 ,(1990) , 10.1016/0956-716X(90)90116-X
E Rabinowicz, Friction and Wear of Materials ,(1966)
M.G. Gee, D. Butterfield, The combined effect of speed and humidity on the wear and friction of silicon nitride Wear. pp. 234- 245 ,(1993) , 10.1016/0043-1648(93)90506-H