作者: V Afanasjev , M Bazhan , B Klimenkov , N Mukhin , D Chigirev
DOI: 10.1088/1742-6596/729/1/012013
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摘要: Investigations of formation conditions oxide heterostructures ZnO/CuO in the same vacuum cycle using RF magnetron sputtering powder targets zinc and copper oxides were carried out. The optical electrical properties thin film structures studied.