作者: Tetsuya Matsumoto
DOI:
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摘要: A treatment liquid application apparatus includes a front-side supply pan (23); back-side (24); line (h,a,b) for supplying to the pans; reserve tank (21); filter chamber (41) including (32); removing and circulating (c); (d); returning (e) from which foreign matter has been removed by flow creation part (25) that creates flows of in respective lines; valves; control (44) controlling valves lines process pans at time power being turned on.