Micro – ring resonator with variety of gap width for acid rain sensing application: preliminary study

摘要: The acid rain is an environmental disaster that it will be intimidates human life. development micro-ring resonator sensor created from SOI (Silicon on insulator) and used to detect index. In this study, the LUMERICAL software was simulate material resonator. result shows optimum values of fixed parameters ring have dependent variable in gap width. layers under with silicone (Si) wafer layer were added seen three conditions capability model. Model – 3 additional bottom gives significant effect factor quality. value a peak given by FSR calculation. = 0, means not light propagation none coming out bus line.