Model Order Reduction for Dynamic Electro-Thermal Simulation of Microsystems

摘要: The modeling of electro-thermal processes, for example Joule heating, is becoming increasingly important in MEMS development. As the spatial discretisation temperature field results large ODE systems (100,000 equations is an engineering standard), the reduction problem size first milestone efficient and system-level simulation. We present application mathematical model order (MOR) methods (preferably Arnoldi algorithm) to automatic generation of accurate dynamic compact thermal models microsystems. The reduced can be formally converted into Hardware Description Language form directly used simulation. [ DOI : 10.1685/CSC06018] About