Open uv/vuv excimer radiator and method for surface modification of polymers

摘要: Excimer gas is introduced uniformly between the electrodes at normal (i.e. atmospheric) pressure, through a suitable nozzle system. It simultaneously performs functions of an inert for entire An Independent claim included corresponding method surface modification; essentially operating radiator open arc source not totally-sealed as in discharge tube). At same time, all air flushed out apparatus, means excimer itself. Preferred features: A chamber located above electrodes, connecting its system to chamber, where excitation are (note: term used generally describe narrow band incoherent UV source; it strictly molecule stable only excited state. The windowless described, especially far UV, since most windows absorb strongly). Between and irradiation (where inerti also occurs), there screening and/or aperture system, which photons molecules reach chamber. designs coordinated, such that flow rate consumption optimized. Ahead irradiator, running direction material being treated, additional producing curtain remove boundary layer from material, prevent interfering elsewhere process.