Effects of Oxygen Partial Pressure and Substrate Temperature on Crystalline Orientation in Y–Ba–Cu–O Films Prepared by Sputtering
作者： Yoshiaki Terashima , Masayuki Sagoi , Kohichi Kubo , Yoshihisa Mizutani , Tadao Miura
DOI: 10.1143/JJAP.28.L653
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摘要: The dependence of crystalline orientation in Y-Ba-Cu-O films on oxygen partial pressure and substrate temperature has been investigated for prepared by magnetron sputtering (100) SrTiO3 MgO substrates. tendencies preferential were the same both At low pressures, c-axis was oriented perpendicularly to film plane. In contrast, a/c-axis formed at intermediate a-axis high pressures. higher temperatures, formed, even
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