PFPE coatings for micro-mechanical devices
作者： Steven A. Henck , Douglas A. Webb , Robert M. Wallace
DOI:
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摘要: A micro-mechanical device (10) includes relatively movable elements (11, 17) which contact or engage and thereafter stick adhere. perfluoropolyether (PFPE) film (31) is applied to the contacting engaging portions of (11,17) ameliorate eliminate such sticking adhesion.
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