作者: Michael Grass , Dirk Schäfer , Thomas Koehler
DOI:
关键词:
摘要: The invention relates to a grating device (50) for phase contrast and/or dark-field imaging of movable object (34), an interferometer unit (20), system (10), method, computer program element controlling such and readable medium having stored element. comprises (51), actuation (52), motion detecting (53), control (54). (52) is configured position the (51) in different sampling positions relative moveable (34). (53) detect detected (34) may be repetitive motion. (54) based on