Faceted euv optical element
作者： Igor Vladimirovich Fomenkov , David Craig Brandt , Alexander Igorevich Ershov
DOI:
关键词:
摘要: A reflective EUV optic such as a collector mirror configured an array of facets that are spaced apart to form respective gaps between adjacent facets. The used inlets for gas flow across one the is introduced parallel surface. can be made with offsets loss area minimized. facilitates removal target material from surface
lens.org 参考文章(15)
Uwe Mickan, Gosse Charles De Vries, Jan Bernard Plechelmus Van Schoot, Erik Roelof Loopstra, Wilhelmus Petrus De Boeij, Illumination system, lithographic apparatus and illumination method ,(2010)
Oleh V Khodykin, Alexander N Bykanov, Alexander I Ershov, Igor V Fomenkov, Drive laser delivery systems for euv light source ,(2007)
William N. Partlo, Robert A. Bergstedt, Nam-Hyong Kim, Igor V. Fomenkov, Beam transport system for extreme ultraviolet light source ,(2009)
Tony C. Carnes, System, method, and software for automating complex alerts ,(2012)
Dzmitry Labetski, Antonius Theodorus Wilhelmus Kempen, Erik Roelof Loopstra, Collector mirror assembly and method for producing extreme ultraviolet radiation ,(2011)
Martin Endres, Ralf Stuetzle, Jens Ossmann, Christian Steigerwald, Damian Fiolka, Berndt Warm, Markus Hauf, Ralf Scharnweber, Udo Dinger, Marc Kirch, Joachim Hartjes, Severin Waldis, Illumination optics for euv microlithography and related system and apparatus ,(2010)
Sang Hyune Baek, Cheong Soo Seo, Jin Young Sohn, Gyoung Il Cho, Hybrid micromirror array lens for reducing chromatic aberration ,(2007)
Richard L. Sandstrom, Marco Giovanardi, Palash P. Das, Huckleberry B. Dorn, Gregory Francis, Alexander I. Ershov, Kyle P. Erlandsen, John W. Nelson, R Kyle Webb, Lithography laser with beam delivery and beam pointing control ,(2003)
Sang Hyune Baek, Cheong Soo Seo, Jin Young Sohn, Gyoung Il Cho, Micromirror array lens with optical surface profiles ,(2007)
Tad Decatur Simons, W. Hopkins Ii George, Ganapati R. Mauze, Gas analyzer with arrangement for spray-cleaning optical element ,(1997)