Structural Properties and Oxidation Resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx Multilayered Films Deposited by Magnetron Sputtering Technique
作者： Ihar Saladukhin , Gregory Abadias , Vladimir Uglov , Sergey Zlotski , Arno Janse van Vuuren
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摘要: … In the present work, the structure, stress state and phase composition of MeN/SiN x (Me = Zr, Cr, Al) multilayered films with the thickness of elementary layers in nanoscale range, as well …
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