Rapid densification of sol-gel derived yttria-stabilized zirconia thin films

摘要: A method based on X-ray reflectivity was used to study the densification behavior of 8 mol% yttria-stabilized zirconia for use in solid oxide fuel cells. Sol–gel derived thin electrolyte films were prepared via spin coating. Subsequent microwave-assisted rapid thermal annealing at 650–1000 °C resulted crack-free 70 nm films. maximum density approximately 95% achieved within 5 min 1000 °C. photoelectron spectroscopy depth analysis showed that shorter times, as opposed conventional heating, lower Si concentrations top surface and substrate interface