Boron and nitrogen co-doping of diamond-like carbon film for transparent conductive films
作者： Wooseok Song , Yooseok Kim , Dae Sung Jung , Su Il Lee , Woosung Jung
DOI: 10.1016/J.APSUSC.2013.06.166
关键词:
摘要: Abstract We demonstrate boron and nitrogen co-doping of diamond-like carbon (DLC) film by vaporizing borane ammonia for applications in anti-scratch extremely robust transparent conductive films. This method allows facile fabrication co-doped DLC (BNDLC) with ultra-flat surface uniform thickness. The simultaneous occurrence graphitization induced increasing the temperature was observed lead to a significant decrease sheet resistance. As result, resistance optical transmittance at 550 nm BNDLC were 3.53 ± 0.19 kΩ/sq 81.25%, respectively.
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