Effect of bias voltage on Diamond-like carbon film deposited on PMMA substrate
作者： Zeng Lin , Shao-Bo Lv , Zhao-Ji Yu , Ming Li , Tie-Yuan Lin
DOI: 10.1016/J.SURFCOAT.2008.06.071
关键词:
摘要: Abstract Bilayered films composed of Diamond-like carbon (DLC) and silicon (Si) were prepared on the surface polymethylmethacrylate (PMMA) substrates using plasma enhanced chemical vapor deposition (PECVD) magnetron sputtering deposition. The deposited investigated by means Atomic force microscopy, X-ray photoelectron spectroscopy UV-Raman spectroscopy. Subsequently, following mechanical friction properties measured: hardness Nano-indenter, coefficient wear rate a ball-on-disk tribometer. After DLC film deposition, higher hardness, lower can be obtained for PMMA substrate. Results indicate that Chemical state, greatly depend negative bias voltage, applied substrate during values are correlated to sp3 content.
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