Tandem linear scanning confocal imaging system with focal volumes at different heights

摘要: A confocal imaging system utilizes an opaque mask with a slit and row of pinpoint sensors or skewed pattern pinholes array isolated in matching order to obtain sufficient data provide complete image for and/or inspecting object such as electronics single one-dimensional scan. The also simultaneously produces multiple images at different heights the scan viewed object, taken spectral bands same be imaged inspected. relative height depth can modified by simply adjusting inclination between path followed that is inspected during optical requires no moving parts only are motorized conveying along path. In one arrangement system, color performed. another simultaneous brightfield darkfield