Parallel single substrate marangoni module
作者： Arthur Keigler , David G. Guarnaccia , Daniel L. Goodman
DOI:
关键词:
摘要: A substrate drying apparatus for a width of surface in liquid. The has liquid tank containing the An injection nozzle is coupled to tank, having continuous knife edge across substrate. drain nozzle, substantially parallel and forms meniscus between directs vapor at meniscus.
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