Piezoelectric ZnO transducers produced by r.f. magnetron sputtering
作者： M.D. Ambersley , C.W. Pitt
DOI: 10.1016/0040-6090(81)90222-4
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摘要: … compared with the glass substrate. It must be noted, however, that the thermal mismatch between glass and ZnO is rather severe compared with that between ZnO and either quartz or …
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