A mass spectrometric study of AsH3 and PH3 gas sources for molecular beam epitaxy

摘要: Abstract The mass spectra of species resulting from the decomposition AsH 3 , PH and a mixture both have been studied with modulated beam spectrometer. Two types crackers, one that decomposes hydrides at high pressure (∽200 – 2000 Torr) them on Ta catalyst low ( ⪷ 0.1 were used. Operating conditions yield predominantly dimers are readily achieved sources although some monomer appears to be present in flux source.