Parametric Identification of Contact Forces Using AFM

作者: EihabM. Abdel-Rahman , A.H. Nayfeh

DOI: 10.1109/ICMENS.2004.1509008

关键词:

摘要: We propose a comprehensive approach to characterize the contact stiffness of surfaces using contact-mode Atomic Force Microscope (AFM). Our procedure utilizes subharmonic resonance order one-half probe-tip-sample system in conjunction with higher-order spectralmeasurements determine independently quadratic and cubic coefficients.

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