Method and apparatus for detecting significant difference of sheet material

作者: Ryuji Kenei-Juutaku Ohnishi

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摘要: A method of detecting a significant difference to-be-checked sheet includes the step scanning traveling (1) by camera in width-wise direction to obtain image data, extracting an outline and defect on from sequentially writing data extracted extraction memory (10) with predetermined cycle accordance travel position simultaneously reading out comparing pattern for immediately preceding as mask latest obtained following cycle, between comparison result step.

参考文章(3)
Hiroshi Makihira, Satoru Fushimi, Yasuhiko Hara, Yoshimasa Ohshima, Method of detecting pattern defect and its apparatus ,(1984)
Hajime Yoshida, Surface inspection apparatus ,(1985)