Probe device having probe heads and method of adjusting distances between probe heads

摘要: A bar formed of a material having known coefficient expansion has probe holders arranged thereon with each the being at selected distance from adjacent holders. The between is in accordance design chip sites on substrate so that probes holder will contact pads particular site. During processing, overall dimensions can shrink more or less than shrinkage as to distances distances. support heated temperature which are spaced If shrunk shrinkage, then additional heating its expands bar. reduced through reducing heat applied thereto and applying suitable coolant. Accordingly, this contraction results spacing becoming after processing substrate.