Control device for a micromirror, method for controlling a micromirror and image projection system
作者： Oliver Krayl , Thomas Hilberath , Detlef Billep , Thomas Gessner , Hendrik Specht
DOI:
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摘要: A method for controlling a micro-mirror, having the following: generating first control signal which encodes tilting motion of micro-mirror about tilt axis, at frequency; second axis is perpendicular to frequency lower than modulating by binary modulation signal, and force coupling elements using modulated signal.
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