Micro- and nanomachining

作者: M.J. Jackson

DOI: 10.1007/978-1-84800-213-5_10

关键词:

摘要: Recent advances in miniaturization have led to the development of microscale components, usually silicon. However, components made from engineering materials require shaping processes other than those established for processing Therefore, traditional machining further order machine that are fit purpose at micro and nanoscales. This chapter provides a timely review current developments recent area nanomachining.

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