Precompressed coating of internal members in a supercritical fluid processing system

摘要: A processing system utilizing a supercritical fluid for treating substrate is described as having internal members coating and coated such system, with the prestressed to reduce problem of generating stresses during processing. For example, in can particulate contamination Additionally, method applying member described, whereby within are relieved when part used high pressure The particularly useful preventing or reducing tensile coatings