Effect of implantation of Sm+ ions into RF sputtered ZnO thin film

作者: Francis Otieno , Mildred Airo , Eric G Njoroge , Rudolph Erasmus , Theodore Ganetsos

DOI: 10.1063/1.5093586

关键词:

摘要: The effects of implantation Samarium ions (Sm+), a rare earth ion (RE) on the properties ZnO films grown Si (001) substrate by RF sputtering system are presented. structural virgin and Sm–implanted thin were investigated Atomic force microscopy, Rutherford backscattering spectroscopy Raman spectroscopy. Local lattice softening caused incorporation highly mismatched Sm+ (ionic radii 0.096 nm 0.113 for Sm3+ Sm2+ respectively) into Zn antisites was detected as red shift in E2 (high) mode likely reduction crystallinity film. Photoluminescence pristine film showed strong near band gap (NBE) emission an intrinsic defect related blue, green-orange emission. NBE is suppressed after while green – orange intensities enhanced result increased defects with charge states. Moreover effect varying concentration presented compared predictions made from Stopping Range Ions Matter (SRIM) calculation.The i...

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