A new two-dimensional ultrasonic assisted grinding (2D-UAG) method and its fundamental performance in monocrystal silicon machining
作者： Zhiqiang Liang , Yongbo Wu , Xibin Wang , Wenxiang Zhao
DOI: 10.1016/J.IJMACHTOOLS.2010.04.005
关键词:
摘要: … and brittle materials, ultrasonic assisted grinding (UAG) may … ultrasonic assisted grinding (hereafter called 1D-UAG) was adopted in which the ultrasonic vibration applied to the grinding …
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