Method for manufacturing electro-optic device, electro-optic device and electronic equipment
作者： Takusoku Iki , 拓則 壹岐
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摘要: PROBLEM TO BE SOLVED: To improve production efficiency by dispensing with a contact hole forming step, and simplifying manufacturing process. SOLUTION: A method for an electro-optic device has: first wiring film step (a) to form gate electrode 3a construct TFT 30 on substrate 10; insulating (b) lower layer 41a cover the 3a; second (c) scanning line 11a be electrically connected 41a. In depositing having non-forming region 41aa directly connecting is formed. COPYRIGHT: (C)2008,JPO&INPIT
lens.org 参考文章(2)
Terauchi Masaharu, Shibuya Munehiro, Nishitani Mikihiko, Morita Yukihiro, Goto Shinji, SUBSTRATE FOR DISPLAY PANEL, PRODUCTION METHOD THEREFOR, AND THIN FILM FORMING APPARATUS USED THEREFOR ,(2002)
Takechi Kazue, TRANSISTOR AND MANUFACTURE THEREOF ,(2001)