Laser control system having a diffraction grating for use in laser processing machine utilizing laser-induced plasma detecting system

作者: Hidehiko Karasaki

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摘要: In a laser processing machine, control system includes photo detector (21) detecting intensity of light generated by laser-induced plasma produced applying beams on an object, and unit (30) for controlling pulse signal to have optimum width period effective in each based the detection signal, so that optimized is obtained thereby automatically generation beams, where controlled outputted from has its peak values be all equal constant level (Vp), as reference threshold (Vr) which previously given material thus total time perforating process can remarkably reduced.

参考文章(3)
Yasuo Yamagishi, Yoshikatsu Ishizuki, Hideya Hashii, Daisuke Mizutani, Tamotsu Owada, Kanae Shimizu, Excimer laser processing method and apparatus ,(1993)