Low-loss waveguide and method of making same
作者： Kevin K. Lee , Lionel C. Kimerling , Kazumi Wada , Desmond R. Lim
DOI:
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摘要: A method of reducing the scattering losses that involves smoothing core/cladding interface and/or change waveguide geometry in high refractive index difference waveguides. As an example, SOI-based Si/SiO2 waveguides are subjected to oxidation reaction at temperatures, after patterning process. By oxidizing rough silicon core surfaces process, interfaces smoothened, roughness
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