Physics of Charging in Dielectrics and Reliability of Capacitive RF-MEMS Switches
作者： George Papaioannou , Robert Plana , M Mukherjee
DOI: 10.5772/8747
关键词:
摘要: … methods of dielectric charging in MEMS capacitive switches the KPFM method plays a … Temperature dependence of dielectric charging constitutes a key issue assessment tool. …
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