Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences
作者： P. Roca i Cabarrocas , N. Layadi , T. Heitz , B. Drévillon , I. Solomon
DOI: 10.1063/1.113803
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摘要: … oxide on the three silicon substrates. In fact, we … -Si:H substrates has been further investigated by the use of LBL conditions at high values of . We have found that the substrate selectivity …
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