Diffraction optical element, projection device, and measurement device

作者: Koji Miyasaka

DOI:

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摘要: An objective of the present invention is, without restricting degrees design freedom an emitted light pattern, to emit a pattern with uniform quantity in detection plane, or such that overall projection is achieved wherein distribution homogeneous, even if zero-order diffracted included. A diffraction optical element according combines diffusion angle conversion function which converts entering by effect, and beam splitting makes split into plurality beams thereby diffused instances having different angles from emitting same.

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