Energy calibration of the 500 kV heavy ion implanter ionas
作者： M. Uhrmacher , K. Pampus , F.J. Bergmeister , D. Purschke , K.P. Lieb
DOI: 10.1016/0168-583X(85)90688-3
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摘要: … HVEE heavy ion implanter IONAS which offers a good compromise between these requirements of ion … The 500 kV ion accelerator IONAS is a slightly modified version of the new HVEE …
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