Reactions of He+, Ne+, and Ar+ with CH4, C2H6, SiH4, and Si2H6

作者: H. Chatham , D. Hils , R. Robertson , A. C. Gallagher

DOI: 10.1063/1.445884

关键词:

摘要: The rate coefficients and product‐ion distributions for the reactions of He+ Ar+ with silane disilane have been measured in a drift tube, typically collision energies 0.01–1 eV. total charge‐exchange are found to be roughly independent E/N, or energy, about equal Langevin values SiH4 C2H6 CH4 C2H6. on Si2H6, Ne+ Si2H6 50% 80% values, while much smaller. Product ions tend hydrogen poor very infrequent breaking C–C Si–Si bonds. Furthermore, stripping is more severe silanes than alkanes. These bear no resemblance either photoionization electron collisional ionization.

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