Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
作者： Li Fan , Anis Husain
DOI:
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摘要: A number of micromachined optomechanical switching cells and matrix switches including such are disclosed herein. One cell the present invention includes a parallel plate actuator positioned on substrate. mirror coupled to is disposed selectively redirect an incident optical beam. The also contemplates switch substrate plurality thereto. further arrangement for monitoring power upon, output by, switch.
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