Amplifying laser pulses having different wavelengths for EUV radiation generation
作者： Wissert Matthias
DOI:
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摘要: Methods, devices, and systems for amplifying laser pulses having different wavelengths in a drive assembly an extreme ultraviolet (EUV) radiation generating device are provided. The includes source configured to generate first pulse wavelength second wavelength, amplifier at least one optical the pulse. has wavelength-selective element attenuate more strongly than wavelength.
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