Sol-gel derived antireflective coatings for silicon
作者： C.J. Brinker , M.S. Harrington
DOI: 10.1016/0165-1633(81)90027-7
关键词:
摘要: TiO 2 -SiO 2 films containing from 30 to 95 mol% TiO 2 were prepared by a sol-gel process. These films were applied to polished silicon and heat treated at temperatures less than 450C …
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sci-hub.se 参考文章(2)
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