TiO2 thin films as sensing gas materials
作者： D. Mardare , N. Iftimie , D. Luca
DOI: 10.1016/J.JNONCRYSOL.2008.06.058
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摘要: Abstract TiO 2 thin films were prepared by DC reactive magnetron sputtering on heated Si, quartz and glass substrates using O water vapor as gases. The percentage of anatase rutile well the grain size strongly depend deposition conditions, revealed X-ray diffraction patterns. deposited Si are pure rutile, while a mixed anatase/rutile structure occurs in substrates. Smaller atmosphere, contrast to grown oxygen. former choice considerably increases sensing properties titanium dioxide films. gas sensitivity was investigated for some reducing gases (methane, acetone, ethanol liquefied petroleum gas) optimum operating temperatures found.
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