Image sensor and manufacturing method thereof
作者： Hoon Jang
DOI:
关键词:
摘要: Disclosed are an image sensor and a manufacturing method thereof. The includes circuit layer on first surface of semiconductor substrate, metal interconnection the layer, trenches formed in second substrate along boundary pixel, light blocking trenches. backside illumination type according to embodiment has structure at rear thereby improving sensing efficiency while inhibiting interference between adjacent pixels.
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