Thin film transistor liquid crystal display array substrate and manufacturing method thereof
作者： Chaoyong Deng , Seung Moo Rim
DOI:
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摘要: A TFT LCD array substrate and a manufacturing method thereof. The includes the steps of: forming thin film transistor on to form gate line electrode connected with substrate; insulating layer semiconductor electrode; an ohmic contact layer; transparent pixel source/drain metal in sequence resultant substrate, wherein is electrically insulated from electrode, forms two sides of via performing masking etching gray tone mask respect data simultaneously.
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