Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
作者： Kris Bhaskar , Brian Duffy , Lalita A. Balasubramanian , Chetana Bhaskar , Santosh Bhattacharyya
DOI:
关键词:
摘要: Various systems and methods for creating persistent data a wafer using inspection-related functions are provided. One system includes set of processor nodes coupled to detector an inspection system. Each the is configured receive portion image generated by during scanning wafer. The also array storage media separately each nodes. send all or selected received arrays such that stored in media.
lens.org 参考文章(30)
James Xu, Ken Lee, Defect review system and method ,(2004)
David Hofer, Heidi E. Dixon, Eugene M. Luks, Matthew L. Ginsberg, Database manipulations using group theory ,(2004)
James A. Smith, Erik Johnson, Defect detection using multiple sensors and parallel processing ,(2005)
Tho Le La, Ying Shiau, Defect management system for productivity and yield improvement ,(1995)
Martinus Hendricus Hendricus Hoeks, Theodorus Leonardus Van Den Akker, Pieter Willem Herman De Jager, Frank Anton Morselt, Marco Cornelis Jacobus Martinus Van Hassel, Lambertus Gerardus Maria Kessels, Lithographic apparatus and device manufacturing method using repeated patterns in an LCD to reduce datapath volume ,(2005)
William J. Leddy, Computer scalable visualization system ,(1991)
Michael D. Kirk, Christopher F. Bevis, David Adler, Kris Bhaskar, Methods and systems for determining a characteristic of a wafer ,(2007)
Sridhar Lakshmanamurthy, Mark Rosenbluth, Instruction-assisted cache management for efficient use of cache and memory ,(2005)
Brian Duffy, Ashok Kulkarni, Systems and methods for creating inspection recipes ,(2007)