Structural and morphological analyses of tungsten oxide nanophasic thin films obtained by MOCVD
作者： D. Barreca , S. Bozza , G. Carta , G. Rossetto , E. Tondello
DOI: 10.1016/S0039-6028(03)00215-2
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摘要: Abstract Nanophasic tungsten oxide thin films were deposited at 500 °C on quartz and glass substrates starting from W(CO) 6 using the metal organic chemical vapour deposition technique. The analysed by X-ray diffraction, photoelectron spectroscopy scanning electron microscopy. By an O 2 + H atmosphere, fully oxidized yellow compound was obtained (tetragonal WO 3 ) with a morphology characterized pyramidal-shaped grains. average crystallite size resulted of 75 nm. Conversely, under N polycrystalline blue deposit obtained, corresponding mainly to mixture oxides in composition range between 2.7 . crystallites have 50 nm revealed packed structure, grains singular wool skein shape.
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