Electrical Characterization of Silicon-on-Insulator Materials and Devices

作者: Sorin Cristoloveanu , Sheng S. Li

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摘要: 1. Introduction. 2. Methods of Forming SOI Wafers. 3. Devices. 4. Wafer Screening Techniques. 5. Transport Measurements. 6. SUS Capacitor Based Characterization 7. Diode 8. Transistor Characteristics. 9. 10. Monitoring the Degradation. Index.

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